產品貨號

產品名稱

產品規格

3380

EMS150T S - High resolution turbomolecular

pumped sputter coater, including

a  54mm Ø x 0.3mm chromium target

標準配置

91003

Edwards RV3 50L/s two-stage rotary pump,

with vacuum hose,

coupling kit and oil mist filter

個

產品貨號

產品名稱

產品規格

3200

Sputtering head insert suitable for

oxidizing and non-oxidizing metals.

Supplied with a 54mm x 0.3mm thick chromium

target as standard. For additional

targets see Sputtering Targets section

個

3210

Additional sputter insert for quick metal change.

Note: this is an entire sputtering assembly.

個

3270

Extended height vacuum chamber （214mm high – the

standard chamber is 127mm high）.

For increased source to sample distance and

for coating large specimens

個

3280

Vacuum spigot allows more convenient connection

of the vacuum hose to the rear of the

EMS150T when bench depth is limited

個

3290

Film thickness monitor （FTM） attachment.

Consists of a built in chamber mounted quartz

crystal oscillator （includes crystal）.

As sputtered or evaporated material is

deposited onto the crystal,

so its frequency ofoscillation is modified.

This ‘modification’ is used to measure

and control the thickness of

material deposited

個

3300

Spare quartz crystals. Pack of three

個

3320

Full range vacuum gauge for low and high

vacuummeasurement （a low vacuum Pirani

gauge is fitted as standard）

個

4513

Glow discharge insert to modify surface

properties （eg hydrophobic to hydrophilic

conversion） or to clean surface

residues （TS and T ES only）.

Can be retrofitted

個

3340

Rotate-tilt specimen stage with adjustable tilt

（up to 90 degrees） and height （37mm-60mm）.

Tilt angle can be pre-set. 50mm Ø specimen

platform with six stub positions for 15mm

or 6.5mm or 1/8" pin stubs. Stage rotation

speed variable between 8 and 20rpm

個

3350

Variable angle “Rotacota” rotary planetary

stage with 50mm Ø specimen platform. Has

six stub positions for 15mm or 6.5mm

or 1/8" pin stubs. Stage rotation

speed variable between 8 and 20rpm

個

3360

Flat rotation specimen stage for

100mm / 4”wafers, includes gearbox for

increased coverage. Stage rotation speed 

variable between 8 and 20rpm

個

3370

variable between 8 and 20rpm.

Includes gear box to allow

optional FTM to be used

個

產品貨號

產品名稱

產品規格

3410

57mm Ø x 0.1mm,金靶

個

3411

57mm Ø x 0.1mm金/鈀靶（80/20）

個

3412

57mm Ø x 0.1mm鉑金靶

個

3413

57mm Ø x 0.1mm鎳靶

個

3414

57mm Ø x 0.1mm銀靶

個

3415

57mm Ø x 0.1mm鈀靶

個

3416

57mm Ø x 0.1mm銅靶

個

3417

57mm Ø x 0.3mm鉻靶

個

3418

57mm Ø x 0.5mm鎢靶

個

3422

57mm Ø x 0.1mm鋁靶

個